Used PLASMA-THERM Tegal

Used
In stock
USA

Seller:

USA

Product Details

Tegal
PLASMA-THERM
Bioreactors
25.10.2025
104

Product Specifications

Yes
Yes
Yes
Yes
Yes

Product Description

Ends 06/16 - To see full details and additional photos please contact us at marketing@govdeals.com with QAL#7547-4216

Location: Tempe, Arizona

Description:

Fully operational Tegal 901 for 150 mm wafers for sale.

*Tegal 901 reactive ion etcher (ASU Asset # 6148173, Tegal 901 reactive ion etcher, serial number D28985930T1). System has been in use at ASU since 2005 and was purchased used. System is functioning and does not include roughing pump or chiller. System includes monitor upgrade to LCD screen (not represented in the attached pictures).